JPS6244526Y2 - - Google Patents

Info

Publication number
JPS6244526Y2
JPS6244526Y2 JP1982152340U JP15234082U JPS6244526Y2 JP S6244526 Y2 JPS6244526 Y2 JP S6244526Y2 JP 1982152340 U JP1982152340 U JP 1982152340U JP 15234082 U JP15234082 U JP 15234082U JP S6244526 Y2 JPS6244526 Y2 JP S6244526Y2
Authority
JP
Japan
Prior art keywords
casing
rotor
exhaust port
peripheral wall
drying device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982152340U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5956739U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15234082U priority Critical patent/JPS5956739U/ja
Publication of JPS5956739U publication Critical patent/JPS5956739U/ja
Application granted granted Critical
Publication of JPS6244526Y2 publication Critical patent/JPS6244526Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP15234082U 1982-10-07 1982-10-07 シリコンウエハ等の水切乾燥装置 Granted JPS5956739U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15234082U JPS5956739U (ja) 1982-10-07 1982-10-07 シリコンウエハ等の水切乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15234082U JPS5956739U (ja) 1982-10-07 1982-10-07 シリコンウエハ等の水切乾燥装置

Publications (2)

Publication Number Publication Date
JPS5956739U JPS5956739U (ja) 1984-04-13
JPS6244526Y2 true JPS6244526Y2 (en]) 1987-11-25

Family

ID=30337334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15234082U Granted JPS5956739U (ja) 1982-10-07 1982-10-07 シリコンウエハ等の水切乾燥装置

Country Status (1)

Country Link
JP (1) JPS5956739U (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6017985B2 (ja) * 1976-05-08 1985-05-08 日本電気株式会社 薄片乾燥機
JP3360314B2 (ja) * 1992-07-20 2002-12-24 大日本インキ化学工業株式会社 フルオロトラン誘導体

Also Published As

Publication number Publication date
JPS5956739U (ja) 1984-04-13

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